Shanghai Hanbell was established in 1996 and listed on Shenzhen A-share market in 2007. Jinan, Guangzhou, Nanjing and Chongqing branches have been set up one after another, and the subsidiaries of Zhejiang Hanson, Shanghai Comer, Hanbell HongKong, Hanbell Vietnam, Hanbell Korea and Zhejiang Comer have been set up one after another. All these reflect the achievements of HANBELL people's hard work in the past 27 years.
HANBELL PRECISE MACHINERY COMPANY 27 YEARS OF HISTORYAIMS TO OPEN
Features
The iPH series screw pump provides great capability for wide application especially in harsh process. The excellent pump performance comes from shortest gas path of rotors and brilliant rotor profile sealing design.
Designed by HANBELL and made in Taiwan or Shanghai
25% power saving than previous version and Green mode equipped
Thermal control solution to avoid cold spot inside of pump
Optimized pimp size, easy for plug and play
Applications:
Etch、Implant、HDP-CVD、SACVD、MOCVD、PECVD、LPCVD、ALD
Technical Data | |||||||||
Product | Unit | iPH100 | Iph200 | iPH610 | iPH1210 | Iph1210h | iPH1220 | iPH1810 | iPH1820 |
Dry pump | m3/h | 120 | 200 | 120 | 120 | 120 | 200 | 120 | 200 |
Booster | m3/h | / | / | 600 | 1200 | 1200 | 1200 | 1800 | 1800 |
Max. Pumping Speed | m3/h | 120 | 200 | 700 | 1100 | 1100 | 1250 | 1800 | 1850 |
Ultimate Pressure | Torr | 7.5x10-3 | 7.5x10-3 | 7.5x10-4 | 7.5x10-4 | 7.5x10-4 | 7.5x10-4 | 7.5x10-4 | 7.5x10-4 |
System Power at Ult. | Kw | 2.1 | 3.5 | 2.6 | 3 | 3.2 | 4.5 | 3.9 | 4.7 |
Inlet | ISO | 63 | 63 | 100 | 100 | 100 | 100 | 160 | 160 |
Outlet | NW | 40 | 40 | 40 | 40 | 40 | 40 | 40 | 40 |
Dimension(mm) | L | 830 | 830 | 830 | 830 | 830 | 830 | 830 | 830 |
W | 400 | 400 | 400 | 400 | 400 | 400 | 400 | 400 | |
H | 526 | 526 | 780 | 780 | 780 | 780 | 830 | 830 | |
Weight | Kg | 280 | 300 | 450 | 455 | 460 | 470 | 515 | 530 |
Catalogue & Technical Manual
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Drawing
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